Optimizing binary dithering patterns to improve phase quality

Junfei Dai; Song Zhang

doi:10.1117/12.2070799

13 November 2014 Optimizing binary dithering patterns to improve phase quality

Junfei Dai, Song Zhang

Proceedings Volume 9276, Optical Metrology and Inspection for Industrial Applications III; 92760C (2014) https://doi.org/10.1117/12.2070799
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

This paper intends to thoroughly evaluate the influences of different phase-shifting algorithms, and optimization directions, and initial patterns. For fair comparisons, we used the same number of iterations for optimization and the same size of optimization patches. The variables are optimization domain (i.e., phase and intensity domain), the step number of the phase-shifting algorithm (i.e.. three and four step), the initial pattern (i.e., Bayer dithered and error diffusion dithered pattern), and the optimization direction (i.e., top to bottom, bottom to top, left to right, and right to left). Our ultimate goal is to generate the best possible quality binary pattern after optimization and hopefully provides guidelines on optimization strategies. Our simulation results suggest that an exhaustive optimization is necessary in order to produce the best quality pattern.

Citation Download Citation

Junfei Dai and Song Zhang "Optimizing binary dithering patterns to improve phase quality", Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 92760C (13 November 2014); https://doi.org/10.1117/12.2070799

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available