Coherent nanopatterning with table-top soft x-ray lasers

W. Li; V. Martinez Esquiroz; D. Patel; L. Urbanski; C. S. Menoni; J. J. Rocca; A. Stein; W. Chao; E. Anderson; M. C. Marconi

doi:10.1117/12.2024472

27 September 2013 Coherent nanopatterning with table-top soft x-ray lasers

W. Li, V. Martinez Esquiroz, D. Patel, L. Urbanski, C. S. Menoni, J. J. Rocca, A. Stein, W. Chao, E. Anderson, M. C. Marconi

Author Affiliations +

Proceedings Volume 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X; 88490W (2013) https://doi.org/10.1117/12.2024472
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

We describe a table top nanofabrication system that utilizes the coherent Talbot imaging effect and a table-top soft x ray laser to implement a defect-free compact nanolithography tool. The Talbot lithography provides a robust and simple setup capable of printing periodic structures over millimeter square areas free of defects. Test structures were fabricated into metal layers showing a complete coherent extreme ultraviolet lithographic process in a table-top system.

Citation Download Citation

W. Li, V. Martinez Esquiroz, D. Patel, L. Urbanski, C. S. Menoni, J. J. Rocca, A. Stein, W. Chao, E. Anderson, and M. C. Marconi "Coherent nanopatterning with table-top soft x-ray lasers", Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490W (27 September 2013); https://doi.org/10.1117/12.2024472

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