Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle

Victor Soltwisch; Sven Burger; Frank Scholze

doi:10.1117/12.2020487

13 May 2013 Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle

Victor Soltwisch, Sven Burger, Frank Scholze

Author Affiliations +

Proceedings Volume 8789, Modeling Aspects in Optical Metrology IV; 878905 (2013) https://doi.org/10.1117/12.2020487
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

Extreme W scatterometry using radiation in the extreme ultraviolet photon energy range, with wavelengths around 13.5 nm, provides direct information on the performance of EUV optical components, e.g. EUV pho tomasks, in their working wavelength regime. Scatterometry with horizontal diffraction geometry, parallel to the grating lines (conical), and vertical scattering geometry, perpendicular to the lines (in-plane), was performed on EUV lithography mask test structures. Numerical FEM based simulations, using a rigorous Maxwell solver, compare both experimental set-ups with focus on the sensitivity of the diffraction intensities particularly with respect to the side wall angle.

Citation Download Citation

Victor Soltwisch, Sven Burger, and Frank Scholze "Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 878905 (13 May 2013); https://doi.org/10.1117/12.2020487

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