Dynamical treatment of the splitting of HOLZ lines from dislocations in silicon

The splitting of higher-order Laue-zone (HOLZ) lines of convergent-beam electron diffraction (CBED) due to the presence of dislocations in Si was investigated experimentally and theoretically. The parameters affecting the separation and relative positions of the fringes of split HOLZ lines were examined with experiments and/or computations. According to the results obtained, a method for identification of Burgers vector is discussed.