Issue 3, 2023

Single-step growth of MoO3 nanorods via magnetron sputtering

Abstract

Uniformly distributed crystalline α-molybdenum oxide nanorods (NRs) were grown on c-plane sapphire substrates using a single-step radio frequency sputtering technique. The shape and size of the NRs can be controlled by regulating the composition of the sputtering gas (Ar : O2 mixture). A pin-like nanowire structure was observed at an Ar : O2 ratio of 20 : 0, which transformed to NRs at Ar : O2 ratios of 20 : 2 and 20 : 4. Additionally, the length of the NRs increased with an increase in the deposition time. X-ray diffraction and transmission electron microscopy analyses indicated the highly crystalline nature of the NRs. X-ray photoelectron spectroscopy measurements revealed that the NRs were composed of nearly stoichiometric α-MoO3. Humidity sensing experiments indicated that the as-grown α-MoO3 NRs have good sensitivity to moisture.

Graphical abstract: Single-step growth of MoO3 nanorods via magnetron sputtering

Article information

Article type
Paper
Submitted
22 Oct 2022
Accepted
01 Dec 2022
First published
07 Dec 2022

CrystEngComm, 2023,25, 378-384

Single-step growth of MoO3 nanorods via magnetron sputtering

G. T. Gudena, H. H. Cho, D. D. Megersa, J. Lee, J. S. Bae and H. K. Yu, CrystEngComm, 2023, 25, 378 DOI: 10.1039/D2CE01450E

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