Abstract
We present a new method for nanoscale atom lithography. We propose the use of a supersonic atomic beam, which provides an extremely high brightness and cold source of fast atoms. The atoms are to be focused onto a substrate using a thin magnetic film, into which apertures with widths on the order of 100 nm have been etched. Focused spot sizes near or below 10 nm, with focal lengths on the order of 10 μm, are predicted. Our method can be implemented in a highly parallel manner, enabling simultaneous fabrication of 106 identical elements, and it is applicable both to precision patterning of surfaces with metastable atomic beams and to direct deposition of material.
Similar content being viewed by others
References
D. Meschede, H. Metcalf, J. Phys. D 36, R17 (2003)
V.I. Balykin, P.N. Melent’ev, Nanotechnol. Russ. 4, 425 (2009)
P. Rai-Choudhury (ed.), Handbook of Microlithography, Micromachining, and Microfabrication (SPIE Optical Engineering Press and the Institution of Electrical Engineers, Bellingham, 1997)
L.A. Giannuzzi, F.A. Stevie (eds.), Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (Springer, Berlin, 2005)
B. Wu, A. Kumar, Extreme Ultraviolet Lithography (McGraw-Hill, Bellingham, 2009)
J.L. O’Brien, A. Furusawa, J. Vuckovic, Nature Photonics 3, 687 (2009)
J.A. Schuller, E.S. Barnard, W. Cai, Y.C. Jun, J.S. White, M.L. Brongersma, Nature Mater. 9, 193 (2010)
V.M. Shalaev, Nature Photonics 1, 41 (2007)
K.S. Johnson, J.H. Thywissen, N.H. Dekker, K.K. Berggren, A.P. Chu, R. Younkin, M. Prentiss, Science 280, 1583 (1998)
M. Baker, A.J. Palmer, W.R. MacGillivray, R.T. Sang, Nanotechnology 15, 1356 (2004)
W. Lu, K.G.H. Baldwin, M.D. Hoogerland, S.J. Buckman, T.J. Senden, T.E. Sheridan, R.W. Boswell, J. Vac. Sci. Technol. B 16, 3846 (1998)
A. Bard, K.K. Berggren, J.L. Wilbur, J.D. Gillaspy, S.L. Rolston, J.J. McClelland, W.D. Phillips, M. Prentiss, G.M. Whitesides, J. Vac. Sci. Technol. B 15, 1805 (1997)
P. Engels, S. Salewski, H. Levsen, K. Sengstock, W. Ertmer, Appl. Phys. B 69, 407 (1999)
Y. Chen, A. Pépin, Electrophoresis 22, 187 (2001)
A.A. Tseng, Small 1, 594 (2005)
S.Y. Chou, P.R. Krauss, P.J. Renstrom, Science 272, 85 (1996)
J.J. McClelland, R.E. Scholten, E.C. Palm, R.J. Celotta, Science 262, 877 (1993)
G. Timp, R.E. Behringer, D.M. Tennant, J.E. Cunningham, M. Prentiss, K.K. Berggren, Phys. Rev. Lett. 69, 1636 (1992)
V. Natarajan, R.E. Behringer, G. Timp, Phys. Rev. A 53, 4381 (1996)
R. Gupta, J.J. McClelland, Z.J. Jabbour, R.J. Celotta, Appl. Phys. Lett. 67, 1378 (1995)
B. Smeets, P. van der Staten, T. Meijer, C.G.C.H.M. Fabrie, K.A.H. van Leeuwen, Appl. Phys. B 98, 697 (2009)
K.K. Berggren, A. Bard, J.L. Wilbur, J.D. Gillaspy, A.G. Helg, J.J. McClelland, S.L. Rolston, W.D. Phillips, M. Prentiss, G.M. Whitesides, Science 269, 1255 (1995)
I.S. Averbukh, R. Arvieu, Phys. Rev. Lett. 87, 163601 (2001)
W.H. Oskay, D.A. Steck, M.G. Raizen, Phys. Rev. Lett. 89, 163601 (2002)
W.G. Känders, F. Lison, A. Richter, R. Wynands, D. Meschede, Nature 375, 214 (1995)
W.G. Kaenders, F. Lison, I. Müller, A. Richter, R. Wynands, D. Meschede, Phys. Rev. A 54, 5067 (1995)
R.R. Chaustowski, V.Y.F. Leung, K.G.H. Baldwin, Appl. Phys. B 86, 491 (2007)
P.N. Melentiev, A.V. Zablotskiy, D.A. Lapshin, E.P. Sheshin, A.S. Baturin, V.I. Balykin, Nanotechnology 20, 235301 (2009)
R. Campargue (ed.), Atom and Molecular Beams: The State of the Art 2000 (Springer, Berlin, 2001)
H. Pauly, Atom, Molecule and Clusterbeams I: Basic Theory, Production, and Detection of Thermal Energy Beams (Springer, Berlin, 2000)
J.R. Buckland, Ph.D. thesis, University of Cambridge, Cambridge, UK (1998)
M.D. Hoogerland, J.P.J. Driessen, E.J.D. Vredenbregt, H.J.L. Megens, M.P. Schuwer, H.C.W. Beijerinck, K.A.H. van Leeuwen, in Proceedings of the 1994 IEEE International Frequency Control Symposium (IEEE, New York, 1994), p. 651
E. Rasel, F.P.D. Santos, F.S. Pavone, F. Perales, C.S. Unnikrishnan, M. Leduc, Eur. J. Phys. D 7, 311 (1999)
Y.T. Xing, I. Barb, R. Gerritsma, R.J.C. Spreeuw, H. Luigjes, Q.F. Xiao, C. R’etif, J.B. Goedkoop, J. Magn. Magn. Mater. 313, 192 (2007)
T. Fernholz, R. Gerritsma, S. Whitlock, I. Barb, R.J.C. Spreeuw, Phys. Rev. A 77, 033409 (2008)
D.W. Keith, M.L. Schattenburg, H.I. Smith, D.E. Pritchard, Phys. Rev. Lett. 61, 1580 (1988)
E. Narevicius, A. Libson, C.G. Parthey, I. Chavez, J. Narevicius, U. Even, M.G. Raizen, Phys. Rev. Lett. 100, 093003 (2008)
D. Loss, D.P. DiVincenzo, Phys. Rev. A 57, 120 (1998)
A. Imamoglu, D.D. Awschalom, G. Burkard, D.P. DiVincenzo, D. Loss, M. Sherwin, Phys. Rev. Lett. 83, 4204 (1999)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Clark, R.J., Mazur, T.R., Libson, A. et al. Nanofabrication by magnetic focusing of supersonic beams. Appl. Phys. B 103, 547–551 (2011). https://doi.org/10.1007/s00340-010-4229-x
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00340-010-4229-x