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Modelling of 4H-SiC VJFETs with Self-Aligned Contacts
Abstract:
Purely vertical 4H-SiC JFETs have been modeled by using three different approaches: the analytical model, the finite element model and the compact model. The results of the modeling have been compared with experimental results on a series of fabricated self-aligned devices with two different channel lengths (0.3 and 1.1μm) and various channel widths (1.5, 2, 2.5, 3, 4 and 5 μm). For all the considered models I-V and C-V characteristics could be satisfactorily simulated.
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Periodical:
Pages:
913-916
Citation:
Online since:
May 2016
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