Novel Concept for Micro-Assembly of Optical Devices Using a Planar Motor System

Abstract

Research and Development in recent years has led to first commercially available, magnetically levitated planar motor systems. Considering the advantages of such systems, they perfectly fit as a substitute for multi-axis fine positioning stages in high-volume productions. To address the need for solutions for high-volume packaging of optical devices, we present a novel concept for a micro-assembly station using a planar motor. To qualify a novel, vacuum-operatable planar motor system for our design, we conducted experiments regarding positioning repeatability, positioning noise, and dynamics on a pre-series system.