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Fabrication of microfluidic devices for packaging CMOS MEMS impedance sensors

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Abstract

This work presents a polydimethylsiloxane (PDMS) microfluidic device for packaging CMOS MEMS impedance sensors. The wrinkle electrodes are fabricated on PDMS substrates to ensure a connection between the pads of the sensor and the impedance instrument. The PDMS device can tolerate an injection speed of 27.12 ml/h supplied by a pump. The corresponding pressure is 643.35 Pa. The bonding strength of the device is 32.44 g/mm2. In order to demonstrate the feasibility of the device, the short circuit test and impedance measurements for air, de-ionized water, phosphate buffered saline (PBS) at four concentrations (1, 2 × 10−4, 1 × 10−4, and 6.7 × 10−5 M) were performed. The experimental results show that the developed device integrated with a sensor can differentiate various samples.

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Acknowledgments

This study was supported by the National Nano Device Laboratories (NDL- P-96-1A-060) and the National Science Council (NSC 96-2221-E-006-289), and made use of shared facilities provided under the Program of Top 100 Universities Advancement funded by the Ministry of Education in Taiwan. The authors would also like to thank the Center for Micro/Nano Science and Technology at National Cheng Kung University and the National Nano Device Laboratories for the access granted to major items of equipment throughout the duration of this study and for their general technical support.

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Authors and Affiliations

  1. Department of Electrical Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, 1 University Road, Tainan, 701, Taiwan

    Ling-Sheng Jang, Chun-Ching Wu & Chia-Feng Liu

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  1. Ling-Sheng Jang
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  2. Chun-Ching Wu
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  3. Chia-Feng Liu
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Correspondence to Ling-Sheng Jang.

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Jang, LS., Wu, CC. & Liu, CF. Fabrication of microfluidic devices for packaging CMOS MEMS impedance sensors. Microfluid Nanofluid 7, 869 (2009). https://doi.org/10.1007/s10404-009-0484-8

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  • DOI: https://doi.org/10.1007/s10404-009-0484-8

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