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RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters

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Abstract

In this paper, new RF-MEMS switch configurations are proposed to enable control of the propagating (even and odd) modes in multimodal CPW transmission structures. Specifically, a switchable air bridge (a switchable short-circuit for the CPW odd mode) and switchable asymmetric shunt impedances (for transferring energy between modes) are studied and implemented using bridge-type and cantilever-type ohmic-contact switches, respectively. The switchable air bridge is based in a novel double ohmic-contact bridge-type structure. Optimized-shape suspension configurations, namely folded-beam or diagonal-beam for bridge-type switches, and straight-shaped or semicircular-shaped for cantilever-type switches, are used to obtain robust structures against fabrication-stress gradients. The switches are modelled using a coupled-field 3D finite-element mechanical analysis showing a low to moderate pull-in voltage. The fabricated switches are experimentally characterized using S-parameter and DC measurements. The measured pull-in voltages agree well with the simulated values. From S-parameter measurements, an electrical model with a very good agreement for both switch states (ON and OFF) has been obtained. The model is used in the design of reconfigurable CPW multimodal microwave filters.

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Acknowledgements

This work has been funded by research project TEC2013-48102-C2-1/2-P and fellowship BES-2008-004923 from the Spanish Ministry of Economy and Competitiveness, and fellowships 340469 and 410742 from the Mexican CONACYT.

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Authors and Affiliations

  1. Department of Signal Theory and Communications, Technical University of Catalonia (UPC), 08034, Barcelona, Catalonia, Spain

    A. Contreras, L. Pradell & J. Heredia

  2. Mechanical Engineering Department, Technical University of Catalonia (UPC), 08034, Barcelona, Catalonia, Spain

    J. Casals-Terré

  3. Electronics and Telecommunications Department, La Salle – Ramon Llull University (URL), Barcelona, Catalonia, Spain

    M. Ribó

  4. Fondazione Bruno Kessler (FBK), Via Sommarive 18, 38123, Trento, Italy

    F. Giacomozzi & B. Margesin

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  1. A. Contreras
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  2. J. Casals-Terré
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  4. M. Ribó
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  5. J. Heredia
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  6. F. Giacomozzi
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  7. B. Margesin
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Correspondence to J. Casals-Terré.

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Contreras, A., Casals-Terré, J., Pradell, L. et al. RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters. Microsyst Technol 23, 5959–5975 (2017). https://doi.org/10.1007/s00542-017-3379-8

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