2023 International Conference on Solid State Devices and Materials

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Poster Session

04: Power / High‐speed Devices and Materials

[PS-4] 04: Power / High‐speed Devices and Materials

Thu. Sep 7, 2023 3:00 PM - 5:00 PM Shirotori Hall (Nagoya Congress Center)

[PS-4-07] First-principles calculation for SiC/SiO2 interface atomic structure after NO annealing

○Mizuho Ohmoto1, Naoki Komatsu1, Mitsuharu Uemoto1, Tomoya Ono1 (1. Univ. of Kobe (Japan))

https://doi.org/10.7567/SSDM.2023.PS-4-07

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