Measurements of Nonlinear Dielectric Constants of Pb(Zr,Ti)O3 Thin Films Using a Dynamic Measuring Method

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Published 20 September 2013 • Copyright (c) 2013 The Japan Society of Applied Physics
, , Citation Yoshiomi Hiranaga and Yasuo Cho 2013 Jpn. J. Appl. Phys. 52 09KA08 DOI 10.7567/JJAP.52.09KA08

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1 Research Institute of Electrical Communication, Tohoku University, Sendai 980-8577, Japan

Dates

  1. Received 21 May 2013
  2. Accepted 24 June 2013
  3. Published

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Abstract

The nonlinear dielectric constants of Pb(Zr,Ti)O3 (PZT) thin films were studied using a dynamic measuring method. The 111-oriented PZT thin films with various Zr/Ti ratios were deposited on platinum-coated silicon substrates using a sol–gel method. The ε333 of the films increased with the Zr concentration in the tetragonal region and reached a maximum value of 280 aF/V close to the morphotropic phase boundary (Zr/Ti= 52/48). This measured value is 400 times larger than that of LiTaO3 single crystals.

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10.7567/JJAP.52.09KA08