Indium–Tin Oxide/Al Reflective Electrodes for Ultraviolet Light-Emitting Diodes

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Published 12 March 2012 Copyright (c) 2012 The Japan Society of Applied Physics
, , Citation Kosuke Takehara et al 2012 Jpn. J. Appl. Phys. 51 042101 DOI 10.1143/JJAP.51.042101

1347-4065/51/4R/042101

Abstract

We investigated indium–tin oxide (ITO)/Al reflective electrodes for improving the light extraction efficiency of UV light-emitting diodes (LEDs). The ITO layer showed high transparency in the UV region upon optimization of the thickness and annealing temperature. As a result, the ITO/Al electrode exhibited both high reflectivity in the UV region and good contact characteristics simultaneously. Using this electrode, we succeeded in improving the light output power of a 350 nm UV-A LED.

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10.1143/JJAP.51.042101