Detection and Application of Acoustic Emission in Laser-Enhanced Chemical Etching

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Copyright (c) 1987 The Japan Society of Applied Physics
, , Citation Tadashi Shiosaki et al 1987 Jpn. J. Appl. Phys. 26 230 DOI 10.7567/JJAPS.26S1.230

1347-4065/26/S1/230

Abstract

Automatic laser focus adjustment and nondestructive flaw detection on a ceramic surface, as well as monitoring of the laser machining process have been successfully carried out using a system to detect, process and feed back the photoacoustic (PA) signal emitted from the laser irradiated work point during the laser-induced chemical solution etching of ceramics such as PbTiO3, PZT and Mn–Zn ferrite.

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10.7567/JJAPS.26S1.230