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  • 學位論文

電極材料影響高效能類鑽碳型紫外光感測器特性之研究

A study on high performance UV detector using Diamond-like Carbon films with various metal electrodes

指導教授 : 林啟瑞

摘要


類鑽碳(Diamond-like carbon, DLC)薄膜擁有許多類似鑽石的物理及化學特性。本研究將利用射頻非平衡磁控濺鍍系統(Radio frequency unbalance magnetron sputtering system)沉積類鑽碳薄膜並探討改變功率對於薄膜表面形貌、內部sp3/sp2之組成比例、表面粗糙度、潤濕性、光學穿透性及薄膜片電阻等相關薄膜特性之影響。研究中透過場發射掃描式電子顯微鏡(FE-SEM)、掃描式探針顯微鏡(SPM)、拉曼光譜儀(Raman spectroscopy)、薄膜水滴濕潤角量測儀、可見光光學檢測儀、四點探針(Four-point probe)與化學分析電子能譜儀(ESCA)進行分析。發現當提高沉積功率時類鑽碳薄膜將產生石墨化之現象。由實驗最佳化之結果得知150 W為最佳沉積功率,可獲得高品質(高sp3含量)之類鑽碳薄膜。接著再將不同比例之sp3/sp2之類鑽碳薄膜以不同功函數金屬(Au、Ag、Ti)材料之交趾狀電極製備出紫外光感測器並於光電導量測系統進行光電特性之探討,發現以鈦電極所製備出之紫外光感測器,其有較為線性的電流-電壓曲線,同時擁有良好的時間響應(2.6 order),此外也具備高穩定性及再現性,上升時間與下降時間分別為0.13秒及0.2秒,達到紫外光光源強度偵測之能力。

並列摘要


Diamond-like carbon (DLC) films are considered to be excellent materials due to their outstanding physical and chemical characteristics. In this study, unbalanced magnetron radio frequency sputtering system was employed to prepare DLC films at room temperature. The effects of working power on properties of the as-deposited films were discussed. The surface property of the DLC films were analyzed by field emission scanning electron microscopy (FE-SEM) and scanning probe microscopy (SPM). The microstructure of the films were studied using Raman spectroscopy and element spectroscopy for chemical analysis (ESCA). The working power were found to have significant effects on sp3/sp2 fraction ratio of the DLC films. Also, the films deposited under 150 W possessed uniform surface morphology, high sp3 content and low surface roughness of 0.542 nm. In order to investigate the effects of sp3 bonding on the photoconductivity of the DLC films, the as-prepared films with different sp3/sp2 ratio were employed as absorption layer for UV detector with various electrode materials (Au, Ag, and Ti). The UV photoresponse measurement results shown that the DLC/Ti had fast response to UV irradiation (rise time and fall time of 0.13 and 0.2 sec, respectively) with high photo-dark current ratio in air ambient of 2.6 order.

參考文獻


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