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  • 學位論文

利用不對稱交錯沉積技術製鍍非均向性二氧化鈦薄膜

Fabrication of TiO2 anisotropic thin film with asymmetric bideposition technique

指導教授 : 任貽均

摘要


本文利用交錯沉積技術製鍍非均向光學薄膜,藉由不對稱的沉積角度與週期厚度來調制薄膜的柱狀傾角,其光學上能增強雙折射特性而拓寬偏極轉換效率強度達80%以上的角頻譜。 在實驗方面,以電子槍蒸鍍系統製鍍各種不對稱組合的沉積角之二氧化鈦非均向光學薄膜並以偏極轉換法量測其角頻譜以得到薄膜之三主軸折射率,發現在同週期厚度下,不對稱角度的落差由大至小,使得柱狀傾角由大至小,雙折特性由大至小。另一方面,在同角度落差下,不同週期厚度由小至大,其雙折射特性由大至小。利用此折射率資料庫,未來能做為廣角度偏極轉換光學元件之設計應用。

並列摘要


In this study, we fabricated anisotropic thin film of titanium dioxide by bideposition technique. In order to control the column angle, we used the asymmetric deposition angle and the pitch of thicknesses. In optical properties, it can enhance the birefringence and broaden angular spectrum of over 80% polarization conversion. In the experiment, we used electron beam evaporation to fabricate anisotropic thin film of titanium dioxide which is combined with different type of deposition angles and the major indices are measured by polarization conversion. We found that asymmetric deposition angle changed from large to small at the same pitch of thicknesses, it caused the column angle changed from large to small and the property of birefringence enhanced from large to small. On the other hand, the different pitch of thicknesses changed from small to large and the property of birefringence enhanced from small to large at the same asymmetric deposition angle. Using this database, it will be designed and applied for the optical element on the wide angle polarization conversion in the future.

參考文獻


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[3]R. M. A. Azzam, “Chiral thin solid films: Method of
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