So far, a few literatures investigate the coupled behavior of a machine structure-foundation-soil model. This study is very helpful for the design of a precise super tool machine. In this study, the coupled model of a machine structure-foundation-soil is established and analyzed. It is expected that due to the analysis of this model the machining of a part and its geometry measurement can be made in the same machine. Therefore, the competition and the complementary value are improved. In this study, there are three divisions: (1) to determine the effective vibration parameters of a coupled block foundation-soil, (2) to analyze the static behavior of a machine structure-foundation-soil model, (3) to analyze the dynamic behavior of a machine structure-foundation-soil model. Finally, the effects of several parameters on the static and dynamic behaviors of this coupled model are investigated.