透過您的圖書館登入
IP:3.133.128.39
  • 學位論文

多元對位標記定位技術之研究

The Study of Automate Locate Technology for Multiple Fiducial Marks

指導教授 : 林春宏

摘要


本文針對精密對位系統所產生的對位標記(fiducial mark, FM)影像(image),進行有對位標記和無對位標記(unfiducial mark, UFM)之偵測與定位的分析。首先選擇影像中的對位標記作為參考對位標記(reference fiducial mark, RFM),然後再擷取RFM上的特徵(feature),最後再依據RFM來搜尋目標影像(target image, TI)中的FM,並定位出FM在影像上的座標(coordinate)。 本文將以影像中的FM或UFM做為自動精密對位系統的主要對位目標,並且以提高對位的精密度與效率作為本文的研究目的。有對位標記的影像中,其中參考對位標記的取得,本文提出自動候選對位標記的偵測;對位標記搜尋的方法主要以在工業界中常遇到之四種對位標記影像偵測,包括有傳統對位標記搜尋、遮蔽物十字標記的偵測、不同標記顏色之偵測以及旋轉十字標記的偵測,其搜尋方式係採用粗糙搜尋(rough search)法至細緻搜尋(fine search)法的方式,以加快搜尋的速度。無對位標記影像中沒有明顯且容易取得的標記,因此必須自行決定參考對位標記;其搜尋與定位的影像有同心圓對位標記的搜尋、直線交點標記的偵測、即時成像的直線的偵測以及標記邊緣的偵測。 本研究的實驗,除了進行自動候選對位標記的偵測之外,同時為了驗證本文定位方法的精確度與效能,也分別針對有對位標記與無對位標記影像的實驗結果,與康耐視的機器視覺系統(Cognex VisionPro)的結果做定位差之比較,實驗證明本文方法可以有效且精確將影像做定位。

並列摘要


In this paper, with regard to fiducial mark (FM) images produced by a precision fiducial system, we conduct analyses of fiducial mark & unfiducial mark (UFM) detection and positioning. First of all, we select the fiducial marks in an image as a reference fiducial mark (RFM). Then we capture the features on RFM. Finally, we search for FM in the target images based on RFM and locate the coordinates of FM in the images. In this paper, we use FM or UFM in images as the main fiducial target of the automatic precision fiducial system. The purpose of the study is to improve fiducial precision and efficiency. For images with FMs, this paper proposes automatic candidate fiducial mark detection to obtain the RFMs. The searching methods of FMs mainly involve the four fiducial mark image detection often encountered in the industry; namely, traditional fiducial mark search, shelter cross mark detection, different mark color detection and rotational cross mark detection. In order to speed up the search speed, the searching methods combine rough search and fine search. NFM images do not have apparent and readily available marks. It is necessary to decide the RFM. The methods of searching and positioning in images include concentric fiducial mark search, line intersection mark detection, real-time imaging line detection, and mark edge detection. Regarding the experiments in this study, other than automatic candidate fiducial mark detection, in order to verify the accuracy and performance of the positioning method proposed in this paper, we also compare the positioning differences of experimental results in images with FMs and UFMs to the results of Cognex VisionPro. The experiments show that the proposed method can efficiently and accurately locate positions in images.

參考文獻


[1] M. Tichem and M. S. Cohen, “Subμm Registration of Fiducial Marks Using Machine Vision”, IEEE Transactions on Pattern Analysis and Machine Intelligence”, Vol. 16, No.8, pp.791-794, 1994.
[2] H. Keith Nishihara and P. A. Crossley, “Measuring Photolithographic Overlay Accuracy and Critical Dimensions by Correlating Binarized Laplacian of Gaussian Convolutions”, IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 10, No.1, pp.17-30, 1988.
[3] X. Fernandez, and J. Amat, “ Research on Small Fiducial Mark Use for Robotic Manipulation and Alignment of Ophthalmic Lenses ”, pp.1143-1146, , 1999.
[4] N. Guil, J. Villalba, and E. L. Zapata, “A Fast Hough Transform for Segment Detection”, IEEE Image Processing, Vol. 4, No.11, pp.1541-1548, 1995.
[8] R. C. Gonzalez, and E. W. Richard, “Digital Image Processing”, Prentice-Hall, 2002.

被引用紀錄


張振麒(2014)。以SOPC技術實現硬體化影像全域搜尋區塊比對演算法之光罩對位系統〔碩士論文,國立虎尾科技大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0028-1507201418351800

延伸閱讀