The purpose of the study is expected to design and fabrication a dielectrophoresis micro-particles sorting chip. We change the particle routes by dielectrophoresis (DEP) force to shifting, sorting, focus or taking in the mixed particles buffer. In the experiment, we design the tilting interdigitated electrodes to sort the target particle, the double curved electrodes to focus the target particle, and the catellated electrodes to take the target particle that using software CFD-RC to simulate the electric field strength and density of the electrodes edges. Using MEMS process we fabricate the electrodes of dielectrophoresis chip, and using SU-8 and PMMA we fabricate protruding channel model to reproduction by PDMS. In the particle experiment, the chip using the castellated electrodes arranged in staggered is inputted voltage AC 20V to find out the conditions of 3μm size Latex under different DEP force by AC frequency scanning techniques. The n-DEP force is effected on the particles in the different electrodes area fit crossover flow rate be Good working efficiency when we input the voltage AC 20V and AC frequency 1M Hz. Through using particles separate testing parameter, we can filter out the separate parameter of 1μm and 3μm Latex mixed particles. Hopefully dielectrophoresis micro particles sorting chip can be applied for technique which are used in the field of cell and microbiology for the examining and technology skills in the future.