此篇論文討論在異質結構太陽能電池表面,利用電子束微影系統(E-beam Lithography)以及反應式離子蝕刻機(Reactive Ion Etch)來製作出二微類十字飛鏢型(Cross-Dart Like)的的週期性微米結構,再利用水熱法(Hydrothermal Method)在表面成長氧化鋅奈米柱,製作出創新的階程式類花朵型(Flower-Like)的表面結構,利用此結構的對稱性搭配氧化鋅抗反射奈米柱,達到全方位漸變折射率的抗反射效果,藉此改善太陽能電池的表面反射率(Reflectance)、外部量子效率(External Quantum Efficiency)、以及短路電流(Short Circuit Current)。實驗量測結果,反射率在400nm至1100nm的波段,由37.41%下降至5.1%,並且外部量子效率在400nm至900nm波段有顯著的提升,此外,短路電流也從34.32mA/cm2提升至39.4mA/cm2。
In this study, we proposed the newly hierarchical flower-like structures (FLS) which combined two-dimensional (2-D) periodic cross-dart like structures (CLS) and one-dimensional (1-D) ZnO nanorods (NRs) on the surface of the amorphous silicon (a-Si)/crystalline silicon (c-Si) heterostructure solar cells (SCs) for light trapping to achieve a great average reflectance reduction from 37.41% to 5.1% in the spectral range from 400 nm to 1100 nm, effectively improve the short circuit current (JSC) from 34.32 mA/cm2 to 39.4 mA/cm2 and a better external quantum efficiency (EQE) performance compared to the references. The new concept has been demonstrated and proven for a-Si/c-Si heterostructure SCs application, and the SCs will accomplish higher efficiency once with an optimized fabrication process.