脊形電光調變器之設計與製作

本論文對於傳統脊形鈮酸鋰z-cut電光調變器，提出一改良式電極結構，使作用到電光係數r33之垂直電場增加，並以數值模擬方法證明，可藉由重疊積分值的提升使半波電壓較傳統式脊形結構降低10~30%，操作頻寬亦與傳統脊形結構相比提升0.3GHz，更進一步討論各項製程參數對於重疊積分的影響。最後實作該結構，量測結果使半波電壓有效自12.65V降為11.2V，實作改善幅度11%。

關鍵字

電光調變器；脊形

並列摘要

In this thesis a new electrode design of ridge-type electro-optical modulator on z-cut lithium niobate is proposed. With this design, vertical electric field can be increased. Numerical calculation shows that overlap integral of optical and electrical field is enhanced such that the drive voltage is decreased by 10~30%. Besides, the bandwidth is increased by 0.3GHz. Moreover, the effect of various fabrication parameters are discussed. Experimental results show that the drive voltage is decreased from 12.65V to 11.2V .

並列關鍵字

Electro-optical Modulator ； ridge

參考文獻

[16] 吳翊魁, “改良式脊形電光調變器之研究,” 國立台灣大學光電工程研究所碩士論文, 2004

[3] S.-J. Chang, C.-L. Tsai, Y.-B. Lin, J.-F. Liu, and W.-S. Wang, “Improved electrooptic modulator with ridge structure in X-cut LiNbO3,” J. Lightwave Technol., vol. 17, no. 5, pp. 843-847, May 1999.

[4] K.Noguchi, O. Mitomi, K. Kawano, and M. Yanagibashi, “High efficient 40GHz bandwidth Ti-LiNbO3 optical modulator employing ridge structure,” IEEE Photonics Technol. Lett., vol. 5, no. 1, pp. 52-54, 1993.

[7] F. Laurell, J. Webjorn, G. Arvidsson, and Johan Holmberg, “Wet Etching of Proton-exchanged Lithium Niobate-A Novel Processing Technique,” J. Lightwave Technol., vol. 10, no. 11, pp. 1606-1609, Nov. 1992.

[8] I. E. Barry, G. W. Ross, P. G. R. Smith, R. W. Eason, and G. Cook, “Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domain,” Material Letters, vol. 37, pp. 246-254, Nov. 1998.

被引用紀錄

黃新舜（2011）。在伽瑪射線照射鈮酸鋰基板上研製脊形方向耦合器〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2011.02247

蔡英哲（2010）。伽瑪射線照射鈮酸鋰脊形馬赫任德電光調變器之研製〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2010.02736

游朝元（2007）。藍光鎂誘鋰外擴散式馬赫任德電光調變器之研製〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2007.00998

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脊形電光調變器之設計與製作

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