Study on the stability of silicon resonator temperature sensors with the Pound–Drever–Hall technique

In this paper, we make research on the temperature stability of silicon-based ring resonator thermometers utilizing Pound-Drever-Hall (PDH) technology. A slight temperature fluctuation of 12.2 mK in 200 s was experimentally detected by immersing the sensor in the triple point of water (TPW) system with ultra-high precision. Additionally, factors that affect temperature stability, including fundamental thermal noises, laser frequency drift and power fluctuation, were analyzed and calculated theoretically. It shows high consistency with experimental results. Moreover, it is proved that laser drift can be suppressed from 11.3 pm to 0.013 pm with the developed experimental system based on the PDH technique. The silicon-based ring resonator as a potential platform for precise temperature monitoring is proved based on this work.