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Multiplexed broadband beam steering system utilizing high speed MEMS mirrors

Posted on 2017-04-28 - 15:12
We present a beam steering system based on microelectromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5×5 array with 4 μs settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.

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