회전속도 변화에 따른 볼트 체결부 접촉강성변화를 고려한 터보분자펌프 로터의 고유진동수와 고유모드 변화에 관한 연구

방제성; 서정민; 박철훈; 박현기; 이주범

doi:10.5293/kfma.2023.26.6.031

주제분류

...

저널정보

저자정보

방제성 (한국기계연구원)
서정민 (한국기계연구원)
박철훈 (한국기계연구원)
박현기 (엘오티베큠)
이주범 (엘오티베큠)

이용수
내서재: 0

내서재에 추가
되었습니다. 내서재에서
삭제되었습니다.

초록·키워드

오류제보하기

Even if active magnetic bearings are widely used in turbomolecular pumps, they experience more difficulty in controlling vibration in the unexpected frequency range, which is not considered in rotordynamics as rigid and flexible body mode. Since the blade wheel and main shaft of TMP are often assembled through bolt joint and interference fit, resonance frequencies are expected to vary according to rotating speed change, which is inevitably caused by the contact status of interference fit and blade wheel and main shaft assembled by bolt joint. In this paper, through finite element analyses, pre-stressed modal analyses are performed to compete with the variation of resonance frequencies and mode shapes for rotating parts of the large and medium capacity turbomolecular pump composed of the blade wheel and main shaft. Firstly, static strength analyses are performed to get pre-stress caused by rotating velocity and check structural integrity. Contact status is also checked on the surface of the interference fit, the surface between the balance plate and blade wheel, and the surface between the blade wheel and main shaft. Finally, modal analyses according to rotating speed are performed, and a Campbell diagram is made to find crossing points. It is found that mode separation and resonance frequency variation are caused by the contact status of the assembly of TMP rotating parts, which should be considered in the control of AMB.

#Turbomolecular pump(터보분자펌프) #Resonance frequency(공진 주파수) #Interference fit(열박음량) #Bolt joint(볼트 체결) #Contact status(접촉 상태) #Campbell diagram(캠벨 선도)