Metadata for Scanning Microwave Microscope, Dielectric Probe Kit and Dielectric Resonator

The presented file contains suggestions for metadata to be protocolled for measurements with three different microwave probing setups: Scanning Microwave Microscope, Dielectric Probe Kit and Resonators. Logging this metadata is an important step to provide ample information on sample and instrument settings and thus allow reliably reproducing measurements. This metadata is an important part of making measurement data findable, accesible, interoperable and re-usable.