Synthesis of Y2O3 Films by Spray Coating with Milled EDTA·Y·H Complexes

Yttrium oxide (Y2O3) films have been successfully
deposited with yttrium-ethylenediamine tetraacetic acid (EDTA·Y·H)
complexes prepared by various milling techniques. The effects of the
properties of the EDTA·Y·H complex on the properties of the
deposited Y2O3 films have been analyzed. Seven different types of the
raw EDTA·Y·H complexes were prepared by various commercial
milling techniques such as ball milling, hammer milling, commercial
milling, and mortar milling. The milled EDTA·Y·H complexes
exhibited various particle sizes and distributions, depending on the
milling method. Furthermore, we analyzed the crystal structure,
morphology and elemental distribution profile of the metal oxide films
deposited on stainless steel substrate with the milled EDTA·Y·H
complexes. Depending on the milling technique, the flow properties of
the raw powders differed. The X-ray diffraction pattern of all the
samples revealed the formation of Y2O3 crystalline phase, irrespective
of the milling technique. Of all the different milling techniques, the
hammer milling technique is considered suitable for fabricating dense
Y2O3 films.