BMVC 1990 University of Oxford
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| Authors: |
T. P. Ellison and C. J. Taylor |
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Paper (PDF, 6 pages, 2208K) |
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| Session: |
SESSION XII: Shape from X and Surface Reconstruction |
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| Citation: |
T. P. Ellison and C. J. Taylor. Calculating the surface topography of integrated circuit wafers from SEM images. In Andrew Sleigh, editors, Proceedings of the British Machine Conference, pages 34.1-34.6. BMVA Press, September 1990. doi:10.5244/C.4.34. |
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| BibTeX: |
@inproceedings{BMVC.4.34, title = {Calculating the surface topography of integrated circuit wafers from SEM images}, author = {Ellison, T. P. and Taylor, C. J.}, year = {1990}, pages = {34.1-34.6}, booktitle = {Proceedings of the British Machine Vision Conference}, publisher = {BMVA Press}, editors = {Sleigh, Andrew}, isbn = {}, note = {doi:10.5244/C.4.34} }
@inproceedings{BMVC.4.34:abbreviated, title = {Calculating the surface topography of integrated circuit wafers from SEM images}, author = {Ellison, T. P. and Taylor, C. J.}, year = {1990}, pages = {34.1-34.6}, booktitle = {Proc. BMVC}, isbn = {}, note = {doi:10.5244/C.4.34} }
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