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TitleA Simple Laser Based Process for the Formation of a LBSF for n-Type Silicon Solar Cells
Author(s)Ulrich Jäger, Dominik Suwito, Jan Benick, Stefan Janz, Martin Hermle, Stefan W. Glunz, Ralf Preu
KeywordsLaser Processing, n-Type, LBSF
TopicWafer-Based Silicon Solar Cells and Materials Technology
SubtopicMono- and Multicrystalline Silicon Materials and Cells
Event25th EU PVSEC / WCPEC-5
Session2CO.5.1
Pages manuscript1386 - 1390
ISBN3-936338-26-4
DOI10.4229/25thEUPVSEC2010-2CO.5.1
Abstract/Summary

We present a simple laser process for the formation of a local back surface field (LBSF) for n-type silicon solar cells. Point contacts are formed by applying a laser process to a doped, passivating layer of amorphous silicon carbide (PassDop layer). In a single processing step, point contacts are opened and local doping of the underlying silicon is done. A variation in dopant content and laser fluency enables the control of the doping profile. The effectiveness of the LBSF structure is investigated on lifetime samples. We find that high dopant content of the PassDop layer and medium laser fluencies yield best values for the suppression of the recombination at the contact.

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