The doi above is for this specific version of this dataset, which is currently the latest. Newer versions may be published in the future. For a link that will always point to the latest version, please use
doi: 10.4121/e363fbd3-c8c2-4bde-b91e-530838cd194a

Marta Saccher (2024): Codes and data associated with the processing of the pre-charged CMUT characterisation. Version 1. 4TU.ResearchData. dataset. https://doi.org/10.4121/e363fbd3-c8c2-4bde-b91e-530838cd194a.v1

Dataset

• Electrical and Electronic Engineering
• Engineering

Capacitive Micromachined Ultrasonic Transducer (CMUT), characterisation, collapse-mode CMUTs, pre-charged CMUTs

March 2020 - March 2024

CC0

RefWorks, BibTeX, Reference Manager, Endnote, DataCite, NLM, DC, CFF

by Marta Saccher

This dataset contains the data relative to the characterisation of the pre-charged collapse-mode CMUTs. To characterise them, the I-V curves (current-voltage) curves of test capacitors fabricated in the same process flow were measured until breakdown. The CMUTs were then characterised by mesuring the shift in C-V (capacitance-voltage) curve after charging, their impedance and the membrane profile using a digital holographic microscope. To assess their charge retention over time, accelerated lifetime tests were perfomed and their impedance was measured over time to detect the time to failure. A readme file is included with explanation of each folder content. Each folder includes also a readme file with explanation of the content.

• 2024-03-19 first online, published, posted

4TU.ResearchData

codes and CV curves: Matlab files ".m"; DHM data: ".txt"; impedance and IV: ".xlsx"

• ECSEL JU, under grant agreement H2020-ECSEL-2019-IA-876190

TU Delft, Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS), Department of Microelectronics