Breakdown Field Model for 3C-SiC Power Device Simulations

Article Preview

Abstract:

Modeling and simulation of 3C-SiC power devices such as MOSFETs and diodes requires a model for the breakdown field that is consistent with the Monte-Carlo-simulated ionization rates of electron and holes and supported by experimental results. The challenge one faces is the limited number of publications reporting such calculations and the limited availability of high-quality ionization breakdown data for 3C-SiC diodes. We therefore performed a series of 2D simulations of both n-type and p-type Schottky diodes and p+-n diodes that confirms the general breakdown field trend with doping density obtained from experiments. We uncovered a difference between n-type and p-type diode breakdown behavior, identified the discrepancy between the calculations and the experimental data, and extracted a simple breakdown field model, useful for further 3C-SiC device design and simulation.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

617-620

Citation:

Online since:

June 2018

Export:

Price:

* - Corresponding Author

[1] B. Xin, R. Jia, J. Hua, C. Tsai, H. Lin, Y. Zhang, Applied Surface Science 357 (2015) 985–993.

Google Scholar

[2] V. Jokubavicius, et al., Crystal Growth & Design 15 (2015) 2940−2947.

Google Scholar

[3] V. Jokubavicius, et al. Crystal Growth & Design 14 (12) (2014) 6514-6520.

Google Scholar

[4] J. W. Sun, et al., Appl. Phys. Lett. 100 (2012) 252101.

Google Scholar

[5] M. Kobayashi, et al., Materials Science Forum 717-720 (2012) 1109-1112.

Google Scholar

[6] C. W. Liu and J. C. Sturm, J. Appl. Phys. 82 (1997) 4558.

Google Scholar

[7] P. G. Neudeck, D. J. Spry, A. J. Trunek, Materials Science Forum 527-529 (2006) 1335.

Google Scholar

[8] P. G. Neudeck, et al., IEEE Trans. on Electron Devices 41 (1994) 826.

Google Scholar

[9] D. J. Spry, A. J. Trunek, P. G. Neudeck, Materials Science Forum 457-460 (2004) 1061.

Google Scholar

[10] E. Bellotti, H.-E. Nilsson, K. F. Brennan, P. Ruden, J. Appl. Phys. 85 (1999) 3211.

Google Scholar

[11] L. Tirino, M. Weber, and K. F. Brennan, J. Appl. Phys. 94 (2003) 423.

Google Scholar

[12] S. Selberherr, Analysis and Simulation of Semiconductor Devices, Springer-Verlag, (1984).

Google Scholar

[13] Silvaco International, User Manual, (2016).

Google Scholar

[14] http://www.ioffe.ru/SVA/NSM/Semicond/SiC/index.html.

Google Scholar

[15] S.M. Sze, Physics of Semiconductor Devices, second ed., Wiley & Sons, New York, (1980).

Google Scholar