Distribution & Access For Publication Downloads News About Us Contact Us
Paper Titles
Palladium-Silica Organic-Inorganic Membrane Materials via a Sol-Gel Process: Preparation and Properties Calcined under H2 Atmosphere
p.889
Structure and Properties of Chitosan and Polyvinyl Alcohol Blend Film
p.895
Electroless Deposition of NiMoB Diffusion Barrier Layer Film for ULSI-Cu Metallization
p.900
Plasma-Enhanced Atomic Layer Deposition of GaN Thin Film at Low Temperature
p.907
Effects Studying of Annealing to Mechanical Properties Carbon-Doped Ti-O Films Synthesized Using CO2 Gas
p.915
Fast Thermal Annealing of CH3NH3PbI3-xClx Films for Improving Hybrid Photovoltaics
p.923
Research on the Properties of Sol-Gel Deposited WO3-NiO Thin Films
p.929
The Effects of the Carrier Concentrations on the Hall Mobilities of ZnO:Al Thin Films Deposited by Magnetron Sputtering
p.938
Radio Frequency (RF) Magnetron Sputtered Barium Strontium Titanate (BST) Thin Film
p.942

Effects Studying of Annealing to Mechanical Properties Carbon-Doped Ti-O Films Synthesized Using CO2 Gas

Article Preview

Abstract:

Carbon-doped Ti-O films were deposited on steel and silicon wafer by DC reaction magnetron sputtering (R-MS) using CO2 as carbon and oxygen source. A series of films were prepared by means of changing the flow of CO2 or O2. The effects of annealing temperature ranging from 300 to 650°C on the properties of Ti-O films under vacuum were studied. X-ray diffraction (XRD) and field emission scanning electronic microscope (FESEM) were employed to analyze and observe structure and morphology of pre-or after-annealed Ti-O films. nanoindentation was used to measure nanohardness and modulus, and recovery was also calculated by the curves of load-displacement. Roughness and thickness were estimated by surface profiler. The XRD studies revealed that the doping of carbon was beneficial to the crystallization of the films. The results showed that the particle size of Ti-O films increased with the increase of annealing temperature, as-annealed carbon-doped Ti-O films have fair mechanical performance.

You might also be interested in these eBooks
Functional Materials Research II View Preview

Info:

Periodical:

Key Engineering Materials (Volume 727)

Pages:

915-922

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.727.915

Citation:

Cite this paper

Online since:

January 2017

Authors:

Hong Wu Liu, Yong Yao Su, Xiao Yu Huang, Jian Lu Xue, Feng Wen*

Keywords:

Carbon-Doped, CO2, Magnetron Sputtering, Nanoindenation, Ti-O Films

Export:

RIS, BibTeX

Price:

Permissions:

Request Permissions

* - Corresponding Author

References

[1] H.L. Chen, P. Luo, Z.Y. Huang, H.P. Chen, M. Chen, D.H. Chen: Diamond Relat. Mater., 2013, 38, 52-58.

Google Scholar

[2] Binh H.Q. Dang, Mahfujur Rahman, Don MacElroy, Denis P. Dowling: Surf. Coat. Technol., 2011, 205(2), S235-S240.

Google Scholar

[3] A.V. Manole, M. Dobromir, M. Gîrtan, R. Mallet, G. Rusu, D. Luca: Ceram. Int., 2013, 39, 4771-4776.

DOI: 10.1016/j.ceramint.2012.11.066

Google Scholar

[4] S.H. Nam, S.J. Cho, C.K. Jung, J.H. Boo, J. Šícha, D. Heřman, J. Musil, J. Vlček: Thin Solid Films, 2011, 519, 6944-6950.

DOI: 10.1016/j.tsf.2011.04.144

Google Scholar

[5] Y. T. Lin, C. H. Weng, F.Y. Chen: Chem. Eng. J., 2014, 248, 175-183.

Google Scholar

[6] Necmettin Kılınç, Erdem Şennik, Müge Işık: Ceram. Int., 2014, 40A, 109-115.

Google Scholar

[7] Khairul Arifah Saharudin, Srimala Sreekantan, Chin Wei Lai: Mater. Sci. Semicond. Process., 2014, 20, 1-6.

Google Scholar

[8] X.Z. Yu, Z.G. Shen: Vacuum, 2011, 85, 1026-1031.

Google Scholar

[9] Y.C. Wu, L.S. Ju: J. Alloys Compd., 2014, 604, 164-170.

Google Scholar

[10] F.R. Marciano, D.A. Lima-Oliveira, N.S. Da-Silva: J. Colloid Interface Sci., 2009, 340, 87-92.

Google Scholar

[11] Y.P. Yang, M.S. Wong: Surf. Coat. Technol., 2014, 14.

Google Scholar

[12] F. Wen, C. Zhang, D. Xie, H. Sun, Y.X. Leng: Nucl. Instrum. Methods Phys. Res., Sect. B, 2013, 307, 381-384.

Google Scholar

[13] M. Torrell, L. Cunha, R. Kabir: Mater. Lett., 2010, 64, 2624–2626.

Google Scholar

[14] M. Torrell, R. Kabir, L. Cunha, M.I. Vasilevskiy: J. Appl. Phys., 2011, 109, 074310–074319.

Google Scholar

[15] K. Wu: The Preparation and the Characteristics of Titanium oxide Films and Carbon-doped ones, Master thesis: JiNan University, (2006).

Google Scholar

[16] L.X. Xu: The preparation and properties research of Ti-O Films ', Master thesis: Southwest Jiaotong University, (2005).

Google Scholar

[17] O liver W C, Pharr G M.: Mter. Res., 1992, 7, 1564- 1583.

Google Scholar

[18] X.Y. Yong, Y.L. Song, Y. Wang: Prog. Org. Coat., 2014, 77, 1972-(1976).

Google Scholar

Scientific.Net is a registered brand of Trans Tech Publications Ltd
© 2024 by Trans Tech Publications Ltd. All Rights Reserved