Performance-Enhanced Heat Converter Used in FPA Utilizing a SiOx/Al Corrugated Micro-Cantilever Actuator

Yan Mei Kong; Rui Wen Liu; Bin Bin Jiao; Di Ke Lu; En Cheng Zhu; Qiang Sheng Fu; Da Peng Chen

doi:10.4028/www.scientific.net/KEM.645-646.951

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646Performance-Enhanced Heat Converter Used in FPA...

Performance-Enhanced Heat Converter Used in FPA Utilizing a SiOx/Al Corrugated Micro-Cantilever Actuator

Abstract:

This paper proposes a performance-enhanced SiOx/Al corrugated micro-cantilever structure, which transfers heat to mechanical deformation. Analytical simulations are carried out using the Finite Element Method (FEM), compared to the traditional straight bi-material structure (TSBMS) with same length L, the corrugated bi-material structures (CBMS) have higher temperature response sensitivity S_T and lower stiffness factor K. Furthermore, two types of cantilever was fabricated, and the test result verifies the change of the stiffness factor K. Finally, the thermal mechanical uncooled infrared focal plane array (FPA) with CBMS was fabricated, and the test results show that the bending response of the CBMS is about 2 times greater than TSBMS with same length. The CBMS proposed in this paper could be used widely in MEMS apparatus field based on bimaterial microcantilever.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

951-956

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.951

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Online since:

May 2015

Authors:

Yan Mei Kong*, Rui Wen Liu, Bin Bin Jiao, Di Ke Lu, En Cheng Zhu, Qiang Sheng Fu, Da Peng Chen

Keywords:

Bi-Material Micro-Cantilever, Corrugation, Finite Element Method (FEM), Stiffness Factor, Temperature Response Sensitivity

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References

[1] Gajendra Shekhawat, Soo-Hyun Tark, Vinayak P. Dravid. Science. 311(2006) 1592-1595.

Google Scholar

[2] A Ezkerra, L J Fernandez, K Mayora and J M Ruano-Lopez. J. Micromech. Microeng. 17(2007) 2264–2271.

Google Scholar

[3] Yu-Hsiang Wang, Chia-Yen Lee, and Che-Ming Chiang. Sensors 7(2007) 2389-2401.

Google Scholar

[4] D. Grbovic, N. V. Lavrik, P. G. Datskos, et al. Appl. Phys. Lett. 89(2006) 073118-1-3.

Google Scholar

[5] Binbin Jiao, Chaobo Li, Dapeng Chen, et al Infrared Physics & Technology. 51(2007). 67-69.

Google Scholar