Nanoindentation-Induced Phase Transformation in Silicon Thin Films

Radim Čtvrtlík; Jan Tomaštík; Vaclav Ranc

doi:10.4028/www.scientific.net/KEM.586.112

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 586Nanoindentation-Induced Phase Transformation in...

Nanoindentation-Induced Phase Transformation in Silicon Thin Films

Abstract:

Nanoindentation-induced phase transformation of amorphous, annealed amorphous and microcrystalline hydrogen-free silicon thin films were studied. Series of nanoindentation experiments were performed with a sharp Berkovich indenter at various unloading rates. The structural changes in indentation deformed regions were examined using Raman spectroscopy. Analyses of indentation curves and Raman spectra suggest that high pressure phases appear more easily in annealed amorphous Si thin films than in microcrystalline ones.

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Periodical:

Key Engineering Materials (Volume 586)

Pages:

112-115

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.586.112

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Online since:

September 2013

Authors:

Radim Čtvrtlík, Jan Tomaštík, Vaclav Ranc

Keywords:

Nanoindentation, Phase Transformation, Silicon, Thin Film

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