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Nanoparticles of Metastable Copper Nitride Grown by Ar Ion Beam Irradiation

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Abstract:

Nanoparticles of metastable copper nitride(Cu3N) have been successfully fabricated from Cu mask using Ar ion ‘transcription method’ which is firstly invented by B.-S. Xu, C. Iwamoto and S.-I. Tanaka in 1996 [1]. The structural and morphological changes with irradiation time are studied by transmission electron microscopy (TEM). The thin film-like crystalline Cu3N which is covered with amorphous or polycrystalline cuprite (Cu2O) layer in the as-received Cu mask plays a role of target. Polycrystalline Cu3N nanoparticles nucleate and grow up to the average size of 15nm after 30 sec-irradiation. Coalesence of 50nm-sized grown Cu3N nanoparticles forms polycrystalline thin film after 2min-irradiation and its growth behavior follows Volmer-Weber mode. As irradiation time increases from 30 sec to 15 min, Cu3N nanoparticles are thought to be grown preferentially along the [111] and [100] directions. Cu2O still remain with Cu3N after 15 min.-irradiation.

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Info:

Periodical:

Advanced Materials Research (Volumes 11-12)

Pages:

567-570

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.11-12.567

Citation:

Cite this paper

Online since:

February 2006

Authors:

Ki Wan Jang, Shun Ichiro Tanaka

Keywords:

Ar Ion Beam Irradiation, Copper Nitride, Metastable, Nanoparticle, TEM, Transcription Method

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