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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20

Solid State Phenomena Vols. 19-20

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20

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Table of Contents

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Paper Title Page

Preface

Intrinsic/Internal Gettering in Czochralski Silicon Wafers

Authors: F. Shimura

1

Defects and impurities in Multi Layer Structures on Si: The Role of Mechanical Stresses in Gettering of Defects and Impurities by Intrinsic and Extrinsic Grain Boundaries

13

Precipitation of Iron in Silicon: Gettering to Extended Surface Defects Sites

Authors: M.D. de Coteau, Peter R. Wilshaw, Robert J. Falster

27

Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Assessment of Thermal Stability

Authors: Robert J. Falster, Z. Laczik, G.R. Booker, Péter Török

33

Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate

Authors: Z. Laczik, Robert J. Falster, G.R. Booker

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On the Role of Stacking Faults in Copper Precipitation in Silicon

Authors: Michael Seibt

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TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles

Authors: A.R. Bhatti, Robert J. Falster, G.R. Booker

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An Influence of Carbon on Intrinsic Gettering Quality and Circuit Performance

Authors: L. Tesar, J. Fojtásaek, J. Kadanka, Josef Bartoš

57

Intrinsic Gettering in Nitrogen-Doped Cz-Si

Authors: J.S. Yang, L.B. Li, Duan Lin Que

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