Substrate Bias Amplification of a SiC Junction Field Effect Transistor with a Catalytic Gate Electrode
p.1507
p.1507
Development of 3C-SiC SOI Structures using Si on Polycrystalline SiC Wafer Bonded Substrates
p.1511
p.1511
Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation
p.1515
p.1515
Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique
p.1519
p.1519
Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices
p.1523
p.1523
Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film
p.1527
p.1527
Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates
p.1531
p.1531
Sublimation Growth of Bulk AlN Crystals: Process Temperature and Growth Rate
p.1537
p.1537
Structural, Optical and Electrical Properties of Bulk AlN Crystals Grown by PVT
p.1541
p.1541
Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices
Abstract:
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Info:
Periodical:
Materials Science Forum (Volumes 457-460)
Pages:
1523-1526
Citation:
Online since:
June 2004
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