Hydrogen Gas Sensors using 3C-SiC/Si Epitaxial Layers
p.1499
p.1499
Electrical and Optical Characterization of Electron Irradiated X Rays Detectors Based on 4H-SiC Epitaxial Layers
p.1503
p.1503
Substrate Bias Amplification of a SiC Junction Field Effect Transistor with a Catalytic Gate Electrode
p.1507
p.1507
Development of 3C-SiC SOI Structures using Si on Polycrystalline SiC Wafer Bonded Substrates
p.1511
p.1511
Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation
p.1515
p.1515
Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique
p.1519
p.1519
Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices
p.1523
p.1523
Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film
p.1527
p.1527
Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates
p.1531
p.1531
Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation
Abstract:
You might also be interested in these eBooks
Info:
Periodical:
Materials Science Forum (Volumes 457-460)
Pages:
1515-1518
Citation:
Online since:
June 2004
Keywords:
Price:
Permissions: