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HomeMaterials Science ForumMaterials Science Forum Vols. 404-407Yield Strength Determination of TiN Film by...

Yield Strength Determination of TiN Film by In-Situ XRD Stress Analysis Method

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Residual Stresses VI, ECRS6

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Periodical:

Materials Science Forum (Volumes 404-407)

Pages:

671-676

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.404-407.671

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Cite this paper

Online since:

August 2002

Authors:

M. Qin, Vincent Ji, Jiu Hua Xu, J.B. Li, Ke Wei Xu, S.L. Ma

Keywords:

Biaxial Stresses, TiN Film, X-Ray Diffraction (XRD), Yield Strength

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