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HomeMaterials Science ForumMaterials Science Forum Vols. 185-188Surface Passivation of III-V Compound...

Surface Passivation of III-V Compound Semiconductors with Chalcogen Atoms

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Passivation of Metals and Semiconductors

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Periodical:

Materials Science Forum (Volumes 185-188)

Pages:

191-198

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.185-188.191

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Online since:

March 1995

Authors:

H. Oigawa, H. Shigekawa, Y. Nannichi

Keywords:

Chalcogen Treatment, III-V Compound Semiconductors, Interface States (or Traps), Surface Analysis, Surface Passivation

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