A Study on the Micro Property Testing of Micro Embossing Patterned Metallic Thin Foil

Hye Jin Lee; Nak Kyu Lee; Hyoung Wook Lee

doi:10.4028/www.scientific.net/KEM.345-346.335

Paper Titles

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Life Estimation of SUS304 Steel Subjected to Nonproportionally Combined Push-Pull and Cyclic Torsion at 973K
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Effects of Small Cracks and Slits on the Fatigue Strength of Steels under Biaxial Loading
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Fatigue Fracture Behavior Depending on Stacking Sequences in Quasi-Isotropic CFRP Laminates after Lateral Impact
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A Study on the Micro Property Testing of Micro Embossing Patterned Metallic Thin Foil
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Beneficial Effects Induced by High Temperature Cycling in Aged Duplex Stainless Steel
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Short Crack Initiation during Low-Cycle Fatigue in SAF 2507 Duplex Stainless Steel
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Thermo-Mechanical Fatigue of the Nickel–Base Superalloy Nimonic 90
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Crack Orientation Dependence for Fatigue Behavior of Titanium Single Crystals
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 345-346A Study on the Micro Property Testing of Micro...

A Study on the Micro Property Testing of Micro Embossing Patterned Metallic Thin Foil

Abstract:

In this paper, Experimental results on the measurement of mechanical properties of fine patterns in the MEMS structure are described. The mechanical properties of embossing patterns on metallic thin foil is measured using the nano indentation system, that is developed by Korea Institute of Industrial Technology(KITECH). These micro embossing patterns are fabricated using CIP(Cold Isostatic Press) process on micro metallic thin foils(Al-1100) that are made by rolling process. These embossing patterned metallic thin foils(Al-1100) are used in the reflecting plate of BLU(Back Light Unit) and electrical/mechanical MEMS components. If these mechanical properties of fine patterns are utilized in a design procedure, the optimal design can be achieved in aspects of reliability as well as economy.

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Periodical:

Key Engineering Materials (Volumes 345-346)

Pages:

335-338

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.345-346.335

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Cite this paper

Online since:

August 2007

Authors:

Hye Jin Lee, Nak Kyu Lee, Hyoung Wook Lee

Keywords:

CIP, Indentation, Mechanical Property, Micro Embossing, Micro Metal Thin Foil

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References

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