Injection Molding Nano and Micro Pillar Arrays

Young Eun Yoo; Young Ho Seo; Seong Kon Kim; Tai Jin Je; Doo Sun Choi

doi:10.4028/www.scientific.net/KEM.326-328.449

Paper Titles

Influence of Ultrasound Power on the Formation of Submicron Etch Pits during Sonoelectrochemical Etching of Aluminum
p.433

Self-Organized Nanoporous Thin-Film Titania Templates Prepared by Anodic Oxidation
p.437

Single-Step UV Nanoimprinting Lithography with Multi-Head Imprinting System and Its Applications
p.441

Super Fine Powderization of Korean Ginseng Using Low Temperature Turbo Mill
p.445

Injection Molding Nano and Micro Pillar Arrays
p.449

A Study on Identification of Bubble Movements in an Automatic Wheel Leakage Detection System
p.453

Mechanical Performance of Silk-Based Structural Composites
p.457

Site Experiment for Predicting Hazardous Geological Formations ahead of Tunnel Face
p.461

Nondestructive Evaluation of Titanium-Nitride Ceramic Coatings
p.465

HomeKey Engineering MaterialsKey Engineering Materials Vols. 326-328Injection Molding Nano and Micro Pillar Arrays

Injection Molding Nano and Micro Pillar Arrays

Abstract:

An injection molding technology is developed to replicate pillars in micro/nano scale on the thin plastic substrate. Two types of pillar are to be replicated and one is square type of 10um x 10um, the other is circular type whose diameter is in range of 100 nm ~ 300 nm. For both types of the pillars, the height is about 250 nm. A pattern master is first fabricated on the photo resist(PR) layer spin coated to about 250nm of thickness on chrome/quartz plate by patterning e-beam writing and then developing the PR. The patterns on the PR master are transferred by nickel electro-plating to fabricate rigid nickel stamper. Using this nickel stamper, a substrate with nano pillars on its surface is injection molded by optimizing the conditions to fabricate DNA separating chip.