The Microchannel of Microfluidic Chip Fabrication by Micro-Powder Blasting

Chiung Fang Huang; Yung Kang Shen; Yi Lin; Chi Wei Wu

doi:10.4028/www.scientific.net/AMR.76-78.367

Paper Titles

A Study on Nozzle Wear Modeling in Abrasive Waterjet Cutting
p.345

Necessary Cutting Energy in Abrasive Waterjet Machining
p.351

Modeling Material Removal in Fracture Erosion for Brittle Materials by Abrasive Waterjet
p.357

Abrasive Technology in Ceramic Restorative Dentistry
p.363

The Microchannel of Microfluidic Chip Fabrication by Micro-Powder Blasting
p.367

Study on Micro Blasting of Glass for Micro Channel Forming
p.373

The Study on the Abrasion Characteristic of Wafer Surface According to Machining Condition
p.381

Nanoscratching-Induced Phase Tansformation of Monocrystalline Silicon – The Depth-of-Cut Effect
p.387

Determination of Elastic Modulus of Thin Coating Materials Using Nanoindentation and Finite Element Analysis
p.392

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The Microchannel of Microfluidic Chip Fabrication by Micro-Powder Blasting

Abstract:

The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm.