Design: New Material Challenge for Silicon ULSI
p.1
p.1
Silicon Wafer Technology: The Challenges towards the Gigabit Era
p.9
p.9
Hydrogen Annealed Silicon Wafer
p.19
p.19
Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal
p.27
p.27
CZ Crystal Growth Development in Super Silicon Crystal Project
p.37
p.37
Gettering by Voids in Silicon: A Comparison with other Techniques
p.43
p.43
Gettering in Advanced Low Temperature Processes
p.53
p.53
Metal Gettering by Defective Regions in Carbon-Implanted Silicon
p.63
p.63
Metallic Impurity Gettering in MeV Implanted Si
p.69
p.69
CZ Crystal Growth Development in Super Silicon Crystal Project
Abstract:
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Info:
Periodical:
Solid State Phenomena (Volumes 57-58)
Pages:
37-42
Citation:
Online since:
July 1997
Authors:
Keywords:
Price:
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