Study on the Lateral Piezoelectric Actuator with Actuation Range Amplifying Structure

Taik Min Lee; Young Ho Seo; Kyung Hyun Whang; Doo Sun Choi

doi:10.4028/www.scientific.net/KEM.326-328.289

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 326-328Study on the Lateral Piezoelectric Actuator with...

Study on the Lateral Piezoelectric Actuator with Actuation Range Amplifying Structure

Abstract:

A novel piezoelectric micro-actuator with actuating range amplification structure has been proposed. This actuator is unique in that the leverage type amplification structure enables large actuating movement with low voltage. In case of general piezoelectric thin film actuator, applied voltage is low and almost zero power is consumed. Its switching time is very fast in comparison with electrostatic actuators and thermal actuators. However, the most drawback of piezoelectric actuator is short actuating range. A 100μm length PZT actuator can only make movement of 100. In this research, we suggest an actuator which can provide geometric amplification of the PZT strain displacement in lateral direction. The lateral piezoelectric MEMS actuator was fabricated and its actuating range was measured. The actuator shows maximum lateral displacement of 1.1μm, and break-down-voltage of the thin film PZT actuator is above 16V.

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Periodical:

Key Engineering Materials (Volumes 326-328)

Pages:

289-292

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.326-328.289

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Online since:

December 2006

Authors:

Taik Min Lee, Young Ho Seo, Kyung Hyun Whang, Doo Sun Choi

Keywords:

Lateral Actuator, MEMS Actuator, Micro-Actuator, Piezoelectric Actuator

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References

[1] N, Maluf: An introduction to microelectromechanical systems engineering (Artech House, 2000).

Google Scholar

[2] S. D. Senturia: Microsystem design (Kluwer Academic Publishers, 2001).

Google Scholar

[3] G. M. Rebeiz: RF MEMS theory, design, and technology (John Wiley & Sons Publication, 2003).

Google Scholar

[4] G. M. Rebeiz and J. B. Muldavin: RF MEMS switches and switch circuits, IEEE Microwave magazine (Dec. 2001) pp.59-71.

DOI: 10.1109/6668.969936

Google Scholar

[5] H. A. Tilmans: MEMS components for wireless communications, EUROSENSORS XVI (Sep. 2002).

Google Scholar

[6] T. Campbell: MEMS switch technology approaches the Ideal Switch, Applied Microwave and Wireless (May. 2001) pp.100-107.

Google Scholar

[7] C. Hsu, W. Tai, and W. Hsu: Design and analysis of an electro-thermally driven long-stretch micro drive with cascaded structure, Proceedings of IMECE2002-33321.

DOI: 10.1115/imece2002-33321

Google Scholar

[8] G. H. Haertling: Rainbow Ceramics: A New Type of Ultra-High-Displacement Actuator, Am. Ceram Soc Bull, Vol 73, No. 1 (1994) pp.93-96.

Google Scholar

[9] Y. Sugawara, K. Onitsuka, S. Yoshikawa, Q. C. Xu, R. E. Newnham, and K. Uchino: MetalCeramic Composite Actuators, J. Am. Ceram. Soc., Vol. 75, No. 4 (1992) pp.996-998.

DOI: 10.1111/j.1151-2916.1992.tb04172.x

Google Scholar

[10] I. Schiele and B. Hillerich: Comparison of lateral and vertical switches for application as microrelays, J. Micromech. Microeng. (1999) pp.146-150.

DOI: 10.1088/0960-1317/9/2/310

Google Scholar