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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 237-240Growth Kinetics and Silicon Diffusivity in MoSi2...

Growth Kinetics and Silicon Diffusivity in MoSi₂ and WSi₂ Disilicides

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Diffusion in Materials - DIMAT2004

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Periodical:

Defect and Diffusion Forum (Volumes 237-240)

Pages:

867-872

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.237-240.867

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Cite this paper

Online since:

April 2005

Authors:

Hakob A. Chatilyan, Lilit H. Arakelyan, Suren L. Kharatyan

Keywords:

Diffusivity, Disilicide, Kinetic, Molybdenum, Parabolic Rate Constant, Silane, Tungsten

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