New Advances in Forming Functional Ceramics for Micro Devices

R.A. Dorey; S. Rocks; F. Dauchy; A. Navarro

doi:10.4028/www.scientific.net/AST.45.2440

Paper Titles

Fabrication, Microstructure and Mechanical Properties Relations of Ferroelectric Barium Titanate Reinforced with Alumina Micro/Nano Particulates
p.2406

Relaxor Single Crystals with Giant k₃₁ Mode
p.2412

Electromechanical Properties of Ferroelectric Thin Films for Piezoelectric MEMS Applications
p.2422

Piezoelectric Ceramics Based on Perovskite Solid Solutions with MPB - Mechanochemical Activation and Texturing for High Sensitivity and Power
p.2432

New Advances in Forming Functional Ceramics for Micro Devices
p.2440

Iterative Method in the Characterization of Piezoceramics of Industrial Interest
p.2448

Influence of Fibre Diameter on the Microstructure and the Piezoelectric Properties of PZT-Fibres
p.2459

Time-Dependent Nonlinear Ferroelastic Behaviour of Soft Lead Zirconate Titanate Piezoceramics
p.2464

Characteristics of (1-y)[(Na_0.5Bi_0.5)_1-xBa_x]O_3-yBa(Cu_1/2W_1/2)O₃ Ceramics Prepared by Hydrothermal Synthesis Route
p.2472

HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 45New Advances in Forming Functional Ceramics for...

New Advances in Forming Functional Ceramics for Micro Devices

Abstract:

Micro electromechanical systems (MEMS) are finding uses in an increasing number of diverse applications. Currently the fabrication techniques used to produce such MEMS devices are primarily based on 2-D processing of thin films. The challenges faced by producing more complex structures (e.g. high aspect ratio, spans, and multi-material structures) require the development of new processing techniques. Potential solutions to these challenges based on low temperature processing of functional ceramics, selective chemical patterning, and micro-moulding are presented to show that it is possible to create complex functional ceramic structures which incorporate non-ceramic conducting and support structures. The capabilities of both techniques are compared and the relative advantages of each explored.