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Fabrication of Microchannels on SiC Substrate by Femtosecond Laser

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Abstract:

A novel femtosecond laser directly writing method was utilized to fabricate microchannels on silicon carbide (SiC) substrate. The micro patterns were transferred to a Polydimethylsiloxane (PDMS) stamp, characterized by both optical microscope and scanning electron microscope (SEM). The relationship between size (depth and width) of channels and power of laser pulse were discussed in detail.

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Info:

Periodical:

Advanced Materials Research (Volumes 557-559)

Pages:

1322-1325

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.557-559.1322

Citation:

Cite this paper

Online since:

July 2012

Authors:

Yi He Li, Hua Xiao, Gong Yi Li, Jian Feng, Xiao Dong Li

Keywords:

Fabrication, Femtosecond Laser, Micro-Channel, Micro-Fluidics, SiC Substrates

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