A method for fabricating a micro-structured surface of polyimide with open and closed pores

Abstract

A new approach for fabricating open and closed porous structures based on laser processing is presented. Liquid polyimide (PI) was mixed with azodicarbonamide which is a chemical blowing agent (CBA), and the mixture was spin-coated and pre-cured in order to fabricate solid PI films. Porous PI was prepared by irradiating PI films mixed with azodicarbonamide. The PI film with azodicarbonamide was etched by using laser ablation, and the azodicarbonamide was decomposed due to the heat induced by the absorbed laser energy. At higher laser beam irradiation, more pores were fabricated due to the resulting increase in the CBA decomposition from 27 mJ/cm² to 40 mJ/cm² per single pulse. A fluence of about 50 mJ/cm² resulted in fewer and larger open pores, which were formed by the coalescence of small pores. In contrast, a closed porous structure was fabricated at a fluence of less than 1 mJ/cm² because PI was barely etched. The proposed method can be used to create open and closed porous structures selectively and is not limited to thermosetting polymers, but is also effective with thermoplastic polymers.