Skip to main content
SpringerLink
Log in

Enhanced adhesion between carbon nanotubes and substrate surfaces by low-temperature annealing

  • Brief Reports
  • Published:
Journal of the Korean Physical Society Aims and scope Submit manuscript

Abstract

We enhanced the adhesion forces between carbon nanotubes (CNTs) and the substrate surface by using a low-temperature annealing process at 180 °C for 300 s to protect the CNTs throughout the processes in photolithography for fabricating CNT-based devices, especially ion and bio sensors which are always exposed to liquids. The adhesion force was tested by using the adhesion durability test of soaking the fabricated CNT field effect transistors (CNT-FETs) in de-ionized water at room temperature for 300 s, and the adsorption quantities of CNTs were analyzed by using I–V measurements on the CNT-FETs before and after each adhesion durability test. The conductance change of the CNT-FETs fabricated with the annealing process was considerably decreased by more than a factor of 105 compared to that without the annealing process, implying that CNTs adhere much more strongly to the substrate after the annealing process.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. S. J. Tans, A. R. M. Verschueren and C. Dekker, Nature 393, 49 (1998).

    Article  ADS  Google Scholar 

  2. R. Martel, T. Schmidt, H. R. Shea, T. Hertel and Ph. Avouris, Appl. Phys. Lett. 73, 2447 (1998).

    Article  ADS  Google Scholar 

  3. M. D. Lay, J. P. Novak and E. S. Snow, Nano Lett. 4, 603 (2004).

    Article  ADS  Google Scholar 

  4. K. Bradley, J. C. P. Gabriel and G. Grüner,, Nano Lett. 3, 1353 (2003).

    Article  ADS  Google Scholar 

  5. S. J. Wind, J. Appenzeller, R. Martel, V. Derycke and Ph. Avouris, Appl. Phys. Lett. 80, 3817 (2002).

    Article  ADS  Google Scholar 

  6. A. Javey, H. Kim, M. Brink, Q. Wang, A. Ural, J. Guo, P. Mcintyre, P. McEuen, M. Lundstrom and H. Dai, Nat. Mater. 1, 241 (2002).

    Article  ADS  Google Scholar 

  7. J. Kong, C. Zhou, E. Yenilmez and H. Dai, Appl. Phys. Lett. 77, 3977 (2000).

    Article  ADS  Google Scholar 

  8. Y. F. Li, R. Hatakeyama and T. Kaneko, Appl. Phys. A 88, 745 (2007).

    Article  ADS  Google Scholar 

  9. N. Sinha, J. Ma and J. T. W. Yeow, J. Nanosci. Nanotechnol. 6, 573 (2006).

    Article  Google Scholar 

  10. C. W. Jang, Y. T. Byun and Y. M. Jhon, J. Nanosci. Nanotechnol. 12, 1765 (2012).

    Article  Google Scholar 

  11. J. Wang, Electroanalogysis 17, 7 (2005).

    Article  Google Scholar 

  12. K. H. Kim, T. G. Kim, S. Lee, Y. M. Jhon, S. H. Kim and Y. T. Byun, J. Korean Phys. Soc. 58, 1380 (2011).

    Article  Google Scholar 

  13. M. Lee, J. Im, B. Y. Lee, S. Myung, J. Kang, L. Huang, Y. K. Kwon and S. Hong, Nat. Nanotechnol. 1, 66 (2006).

    Article  ADS  Google Scholar 

  14. J. Kim, J. H. Yun, J. W. Song and C. S. Han, Sens. Actuators, B 135, 587 (2009).

    Article  Google Scholar 

  15. Y. Wang, Z. Zhou, Z. Yang, X. Chen, D. Xu and Y. Zhang, Nanotechnology 20, 345502 (2009).

    Article  Google Scholar 

  16. T. Hertel, R. E. Walkup and P. Avouris, Phys. Rev. B 58, 13870 (1998).

    Article  ADS  Google Scholar 

  17. K. H. Kim, C. W. Jang, T. G. Kim, S. Lee, S. H. Kim and Y. T. Byun, J. Nanosci. Nanotechnol. 12, 1251 (2012).

    Article  Google Scholar 

  18. A. Plößl and G. Kräuter, Mater. Sci. Eng., A 25, 1 (1999).

    Article  Google Scholar 

  19. F. N. Ishikawa, M. Curreli, C. A. Olson, H. I. Liao, R. Sun, R. W. Roberts, R. J. Cote, M. E. Thompson and C. Zhou, ACS Nano 4, 6914 (2010).

    Article  Google Scholar 

  20. Q. Y. Tong, G. Kidao, T. Y. Tan and U. Gösele, in International Conference on Solid-State and Integrated Circuit Technology (Beijing, China, October 24–28, 1995), p. 524.

Download references

Author information

Authors and Affiliations

  1. Sensor System Research Center, Korea Institute of Science and Technology, Seoul, 136-791, Korea

    Chi Woong Jang, Young Tae Byun, Deok Ha Woo, Seok Lee & Young Min Jhon

Authors
  1. Chi Woong Jang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Young Tae Byun
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Deok Ha Woo
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Seok Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Young Min Jhon
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Young Min Jhon.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Jang, C.W., Byun, Y.T., Woo, D.H. et al. Enhanced adhesion between carbon nanotubes and substrate surfaces by low-temperature annealing. Journal of the Korean Physical Society 61, 2096–2099 (2012). https://doi.org/10.3938/jkps.61.2096

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.3938/jkps.61.2096

Keywords

Search

Navigation