Skip to main content
SpringerLink
Log in

MEMS-based NO2 gas sensor using ZnO nano-rods for low-power IoT application

  • Published:
Journal of the Korean Physical Society Aims and scope Submit manuscript

Abstract

A micro-electro-mechanical-system (MEMS)-based NO2 gas sensor was fabricated and characterized by using ZnO nano-rods for the Internet of Things (IoT) monitoring system. The implementation process was fully compatible with the standard 6-inch 0.8-μm complementary metal oxide semiconductor (CMOS) process for mass-production, resulting in the simple 5-photomask process. In addition, for high sensitivity applications, semiconducting ZnO nano-rods were chosen and synthesized using the hydrothermal method at temperatures below 100 °C. Based on the ZnO nano-rods and the fast response time of a MEMS-based heater, the NO2 gas sensor had a sensitivity of 0.36 at 0.5 ppm. Furthermore, a power consumption of 15 mW in the normal operation mode was achieved with a MEMS-based micro-heater, showing that the preliminary result can be applied for IoT applications operating at low power.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. N. Yamazoe, Sens. Actuators B 108, 2 (2005).

    Article  Google Scholar 

  2. L. Sherly Puspha Annabel and K. Murugan, ETRI J. 37, 408 (2015).

    Google Scholar 

  3. S-C. Son, B-T. Lee, S. K. Ko and K. Kang, ETRI J. 38, 560 (2016).

    Google Scholar 

  4. J. Gardner and P. N. Bartlett, Electronic Nose: Principles and Applications (Oxford University Press, New York, 1999).

    Google Scholar 

  5. Y. Shimizu and M. Egashira, MRS Bull. 24, 18 (1999).

    Article  Google Scholar 

  6. N. Barsan, D. Koziej and U. Weimar, Sens. Actuators B 121, 18 (2007).

    Article  Google Scholar 

  7. C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand and H. Baltes, Nature 414, 293 (2001).

    Article  ADS  Google Scholar 

  8. S. E. Moon, H-K. Lee, N-J. Choi, J. Lee, C. A. Choi, W. S. Yang, J. Kim, J. J. Jong and D-J. Yoo, Sens. Actuator B 187, 598 (2013).

    Article  Google Scholar 

  9. S. Zampollia, I. Elmia, J. Sturmannb, S. Nicolettia, L. Doria, G.C. Cardinalia, Sens. Actuator B 105, 400 (2005).

    Article  Google Scholar 

  10. P. Ivanov, E. Llobet, X. Vilanova, J. Brezmes, J. Hubalek, X. Correig, Sens. Actuators B. 99, 201 (2004).

    Article  Google Scholar 

  11. J. W. Gardner, V. K. Varadan and O. O. Awadelkin, Microsensors, MEMS, and Smart Devices (Wiley, New York, 2001).

    Book  Google Scholar 

  12. J. S. Suehle, R. E. Cavicchi, M. Gaitan, S. Semancik, Electron Dev. Lett. 14, 118 (1993).

    Article  ADS  Google Scholar 

  13. M. Graf, D. Barrettino, K-U. Kirstein, A. Hierlemann, Sens. Actuators B 117, 346 (2006).

    Article  Google Scholar 

  14. P. K. Guha, S. Z. Ali, C. C. C. Lee, F. Udrea, W. I. Milne, T. Iwaki, J. A. Covington, J. W. Gardner, Sens. Actuators B 127, 260 (2007).

    Article  Google Scholar 

  15. I. Elmi, S. Zampolli, G. C. Cardinali, Sens. Actuators B 131, 548 (2008).

    Article  Google Scholar 

  16. Y. W. Mo, Y. Z. Okawa, K. J. Inoue, K. Natukawa, Sens. Actuators A 100, 94 (2002).

    Article  Google Scholar 

  17. C. Rossi, P. Temple-Boyer, D. Esteve, Sens. Actuators A 64, 241 (1998).

    Article  Google Scholar 

  18. J. X. Wang, X. W. Sun, Y. Yang, H. Huang, Y. C. Lee, O. K. Tan, L. Vayssieres, Nanotechnology 17, 4995 (2006).

    Article  ADS  Google Scholar 

  19. S. E. Moon, J-W. Lee, S-J. Park, J. Park, K-H. Park and J. Kim, J. Korean Phys. Soc. 56, 434 (2010).

    Article  Google Scholar 

  20. N. Barsan, M. Schweizer-Berberich, W. Gopel, Anal. Chem. 71, 2512 (1999).

    Article  Google Scholar 

  21. C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand and H. Baltes, Nature 414, 293 (2001).

    Article  ADS  Google Scholar 

  22. European Environment Agency, Air pollution (EEA Report, 2001).

Download references

Author information

Authors and Affiliations

  1. ICT Material Research Group, Electronics and Telecommunications Research Institute, Daejeon, 34129, Korea

    J. Lee, J. Kim, J. P. Im, S. Y. Lim, J. Y. Kwon, S.-M. Lee & S. E. Moon

  2. Department of Advanced Engineering, University of Science and Technology, Daejeon, 34113, Korea

    J. Y. Kwon & S. E. Moon

Authors
  1. J. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. J. P. Im
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. S. Y. Lim
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. J. Y. Kwon
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. S.-M. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. S. E. Moon
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to S. E. Moon.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Lee, J., Kim, J., Im, J.P. et al. MEMS-based NO2 gas sensor using ZnO nano-rods for low-power IoT application. Journal of the Korean Physical Society 70, 924–928 (2017). https://doi.org/10.3938/jkps.70.924

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.3938/jkps.70.924

Keywords

Search

Navigation